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Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ

Process Gas Equipment ? Process Gas Equipment
    ?For UHP gas delivery in semiconductor and other clean industries
    ?Body material: 316L SS secondary remelt or 316L SS
    ?Electropolished wetted parts
    ?External metal seal construction
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesTypeApplicationBody materialConnection typeConnection size
AP/SLSingle stageDistribution (Compact)316L SS
secondary remelt		Face seal
Tube weld		1/4'', 3/8''
AP/SLSingle stageDistribution316L SS
secondary remelt		Face seal
Tube weld		1/4'', 3/8''
1/2'', 3/4''
AP/SLSingle stageBulk gas316L SSFace seal
Tube weld		1/2'', 3/4'', 1''
AP/SLSingle stageSource316L SS
secondary remelt		Face seal
Tube weld		1/4'', 3/8''
1/2'', 3/4''
AP/SLSingle stageSub-atmospheric pressure316L SS
secondary remelt		Face seal
Tube weld		1/4'', 3/8''
1/2'', 3/4''
APTwo stageSource316L SS
secondary remelt		Face seal
Tube weld		1/4''，3/8''
AZSingle stageDistribution316L SSFace seal
Tube weld		1/4'', 3/8''
1/2''
AZSingle stageSource316L SSFace seal
Tube weld		1/4'', 3/8''
1/2''
AZSingle stageSub-atmospheric pressure316L SSFace seal
Tube weld		1/4'', 3/8''
1/2''

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